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연구실적

1990
Impervious Graphite 장치개발 -기계구조용 Carbon Seal기능
-Hardness 향상
1992
Graphite표면에 SiC Coating처리기술
개발
-Graphite산화억제
-Hardness 향상
-Purity 향상
1995
SiC Coating Heater 개발
SiC Coating Susceptor 개발
-Graphite산화억제
-Hardness 향상
-Purity 향상
-High Temperature 실현
1998
SiC(Silicon Carbide) 개발
-Mechanical Structure Products
-Thermal/Semiconductor Hardware   Parts etc 응용
1999
Carbon & Graphite Density향상기술개발
-산화억제
-Hardness 향상
1999
Ga As 증착 SiC Coating Susceptor
개발
-CVD성능향상
2001 유기 EL Crucible,Boat 개발
-Thermal Uniformity 향상
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